Manufacturer

Shibaura-Shibatec

Model

CDE-80NH

Wafer Size

8 inch

Conation Id

142

Configuration

Polysilicon Etch tool  -  Serial Number: SFX0041

  • Wafer Size: 200 mm
  • Single cassette
  • Single chamber
  • Transfer chamber
  • DAIHEN SGM-10A1 Generator
  • 5 Gas Boxes
  • Main Controller
  • TAITEC CH-402BF chiller
  • Operations and maintenance manuals
  • OEM equipment instruction manual

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