Manufacturer

KLA-Tencor

Model

Spectra

Wafer Size

200 mm or 300 mm

Conation Id

I-0064

Configuration

KLA - Tencor Spectra FX 100 (SCD frame)

  • 200 mm or 300 mm wafer capable
  • 200 mm open cassatte
  • DFIMS 300mm Brooks / Asyst or Phoenix
  • Wafer stage: Vacuum adsorption
  • Stage resolution : X, Y 0.1 μ m
  • : Z (1x) 0.1 μ m
  • : Z (4x,15x) 0.005 μ m
  • Stage stopping accuracy 3: ±1.5 μ m
  • 200 - 300mm (300SO/DF)
  • Automatic focusing mechanism: Piezo drive (only 4x,15xDBS, SE): Linear drive (only 1xDBS)
  • Largest range of vision: 1.125mm×1.50mm (at the time of 1x objective use)

Illuminant

  • Xenon arc lamp (220~780nm)
  • Deuterieum Lamp
  • Film thickness total of each stratum 20.0nm-5μm
  • Reflectance ratio measurement
  • DBS ( Dual Beam Spectrometer )
  • SE ( Spectroscopic Ellipsometer )
  • Hardware: Deuterium Lamp ( D2 ) Assy. DUV 190 (optional)
  • Software: 4.9
  • Stress (optional)

 

Pattern recognition system

  • CCD camera
  • COGNEX 8100+PatMax system : Standard

 

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