Manufacturer

KLA-Tencor

Model

SP1 TBi

Wafer Size

8 inch/12 inch

Conation Id

I-0051

Configuration

KLA - Tencor Surfscan SP1 TBI Unpatterned Surface Inspection System  -  Vintage: 2006

  • Wafer Size: 8”
  • SMIF: No
  • Tool Configuration:
  • Micro View Measurement Capability
  • 0.08um Defect Sensitivity using Oblique Illumination
  • Haze Sensitivity - 0.005-ppm
  • Argon Ion Laser 30mw (488-nm)
  • RTDC (Real Time Defect Classification)
  • Map to Map
  • 4 Dark Field Collection Channels
  • Measurement Chamber with ULPA Filter
  • KLA-Tencor Standard Blower Unit
  • Windows NT 4.0 OS
  • KLA SP1 Application Software Power MX 4.0 Version
  • Interactive Pointing Device & Keyboard Controls
  • Pioneer DVD R/RW
  • 3.5” Floppy
  • 40G SCSI Hard Disk
  • 18” TFT-LCD Display
  • Parallel Printer Port
  • Defect Map and Histogram with Zoom
  • One open cassette Station for 200mm
  • X-Y Option
  • CAL Curve

Information Request

Please enter your name
This field should NOT be filled in!
Please enter a valid email address
Please describe what information you would like about this equipment.