Manufacturer

KLA-Tencor

Model

Aset F5x

Wafer Size

200/300

Conation Id

FC-1005

Configuration

KLA - Tencor Aset F5x
Summit SW Version 2.60.22

SN 0107804

  • Computer Type¬† P3 450Mhz (can be upgraded)
  • Windows NT
  • Handler Type
  • Single Open Cassette Handler (can be configured for SMIF 200mm or DFIMS 300 mm)
  • DBS and SE mode
  • 200 / 300 mm configurable

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