Manufacturer

KLA-Tencor

Model

Archer AIM

Conation Id

596a

Configuration

KLA - Tencor Archer AIM Overlay Measurement System

 

Currently Configured for 200mm and 300mm (DFIMS)

MFG Date: 20034

CE Marked

 

Cassette Interface:

(2) Asyst 300FL Integrated SMIF

25-Slot FOUPs

GEM/SECS & HSMS

 

Computer:

CPU: Pentium III, 1.3GHz

MEM: 1GB

3.5” (1.44MB) Floppy Drive

CD-Rom

Tape Drive backup (DAT)

Image Thermo Printer

 

Viewsonic Flat-Screen High-Res. Monitor

Network Ready 10Base-T: RJ45, BNC, AUI Connectors

OS SW ver: Win XP Pro SP1

System SW ver: 5.50.04 P03

Platform SW ver: 5.12.04 P03

Automatic Arrayed Target measurement SW

 

Options (may need to be enabled):

E84 (for OHT & AGV/RGV)

E84 Hokuyo Device (for OHT w/ 5m cable)

OHT Lockout

E87 Carrier Mgmt services (based on E39)

Carrier ID Hermos Single Wire Multi-page Read/Write

Wafer ID SEMI T7

CMP Measurement Option (CPM+ANRA)

Status Lamp (RYGB, incandescent)

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