Manufacturer

KLA-Tencor

Model

Archer 10 XT

Wafer Size

configurable for 200 mm

Conation Id

I-0025

Configuration

KLA Archer 10 System - Overlay  Mainframe only, complete  -  Configurable for 200 mm

  • KLA Tencor Interface 300DFFIP:
  • Asyst Load Port SMIF-300FL (qty. 2)
  • PRI Pre Aligner PRE-300B-CE
  • PRI Robot Track TRA035-LPS
  • Brooks Robot Controller ESC-218BT-S293
  • Brooks Robot ABM407B-1-S-CE-S293
  • X-Y Axis Stage:
  • KLA 5300 XY Assembly Part No: 565 090 513
  • Leica Objective Lens HC PL Fluotap 100X/0.70
  • KLA 5300NT PDA Box 710-482350-001
  • KLA Tencor Power Distributor 10XT
  • Trenton Computer Box with Improved PS 0059514-001
  • Vacuum Panel 590-480376-001
  • KLA Circuit Board 0051644-002
  • Integrated Dynamics Engineering 3000187_000
  • ETEl Digital Servo Drive DSB2 (Nanometer) (qty. 5)
  • KLA Tencor Optics 720-480542-002:
  • Coho Progressive Scan Camera 6612-3000/0000
  • KLA Tencor 5300NT PDA Box Assembly 710-482350-001
  • X-Y Axis Stage Cover:
  • View Sonic Flat Panel LCD Monitor VGI81 Model# VLCDS21594-1
  • Mitsubishi Printer P91D
  • Miscellaneous Computer Parts
  • Software and Manuals:
  • KLA Tencor RDM 3.3 Software and Documentation Kit
  • Archer Product Family Version 3.10 CD ROM

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