Manufacturer

KLA-Tencor

Model

AIT XP

Conation Id

565

Configuration

KLA - Tencor AIT XP
SN 9292; 
Software Version5.3.20.7;
pen cassette 200mm configuration;
Can be set for 150 mm to 300 mm;
Illumination Hardware;
Spot Size: 10 um, 5 um, 3.5 um;
RTC;
Offline Bare Wafer Review Paid;
GEM/SECS; iADC

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