Manufacturer

KLA-Tencor

Model

AIT II

Wafer Size

6 inch or 8 inch

Conation Id

I-0022

Configuration

KLA - Tencor AIT II Wafer Inspection System  -  SN 9294

 

  • Set up for 6” or 8"
  • Dual open loader
  • Double Darkfield Inspection Tool Standard features Modular Inspection Station
  • 75mW, 488nm Argon Ion Laser
  • High Resolution Flat Panel Display
  • Fully Integrated Review Microscope with AutoFocus Capability (10x, 50x, 100x, 150x objectives)
  • Two fully independent inspection channels
  • 10um Single Incident Spot Optics
  • Additional 7um and 5um spot size
  • Low Contact Chuck
  • Integrated ULPA Filter - Class 0.1 (ISO Class 2 or better)
  • Network Communication
  • Windows NT 4.0 based Operating System
  • Handler Protective Cover
  • KLA rf Output

 

Information Request

Please enter your name
This field should NOT be filled in!
Please enter a valid email address
Please describe what information you would like about this equipment.