Manufacturer

KLA-Tencor

Model

2135

Wafer Size

6 or 8 inch

Conation Id

112

Configuration

KT KLA - Tencor 2135 Mainframe  -  Inspection tool  -  Wafer Size: 200mm
SN: 1131

  • CE mark
  • Pentium II CPU with Windows 3.11
  • DOS computer
  • Mercury Xenon Lamp
  • Light level sensor with adjustable 2x Mag Tubes
  • X/Y/Z drive/controller chassis and motion controller card
  • SAT (Segmented Auto Threshold)
  • High voltage electronics
  • Granite stage
  • Autofocus II
  • Standard Chuck
  • 15 inch Flat screen Monitor
  • 15 inch Image Computer monitor
  • User Interface Monitor
  • Left or Right hand side User interface
  • Line Conditioner
  • Wafer handling module
  • EMOs with switch covers
  • Spotsize: 0.25um, 0.39um, 0.625um & 5um

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